| Application of Graphene Oxide in Perfluoroether Rubber Materials of O-ring for Semiconductor Processing |
| Received:May 10, 2021 Revised:May 10, 2021 |
| DOI：10.12136/j.issn.1000-890X.2022.4.0279 |
| Key Words: graphene oxide；perfluoroether rubber；composite；O-ring；compression set；dielectric resistance |
| Author Name | Affiliation | E-mail | | ZHANG Shixin* | Zhejiang Chuangcheng Polymer Material Co. ， Ltd | 824139418@qq.com | | WEI Haidong | Zhejiang Chuangcheng Polymer Material Co. ，Ltd | | | CHU Min | Beijing Research and Design Institute of Rubber Industry Co. ，Ltd | |
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| Abstract: |
| The effects of the dosage of graphene oxide（GO）on the physical properties，compression set and dielectric resistance of GO/perfluoroether rubber（ FFKM）composites were studied. The results showed that with the increase the dosage of GO，the shore A hardness and high temperature compression set of the GO/FFKM composites changed little，and the tensile strength and tear strength increased at first and then decreased. When the dosage of GO was 1 phr， the tensile strength and tear strength of the GO/FFKM composites were the largest and the dielectric resistance was better. The GO/FFKM composites were suitable
for the O-rings for semiconductor processing. |
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