| 氧化石墨烯在半导体加工用O形圈全氟醚橡胶材料中的应用 |
| Application of Graphene Oxide in Perfluoroether Rubber Materials of O-ring for Semiconductor Processing |
| 投稿时间：2021-05-10 修订日期：2021-05-10 |
| DOI：10.12136/j.issn.1000-890X.2022.4.0279 |
| 中文关键词: 氧化石墨烯 全氟醚橡胶 复合材料 O形圈 压缩永久变形 耐介质性能 |
| 英文关键词: graphene oxide perfluoroether rubber composite O-ring compression set dielectric resistance |
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| 中文摘要: |
| 研究氧化石墨烯（GO）用量对GO/全氟醚橡胶（FFKM）复合材料物理性能、压缩永久变形和耐介质性能的影响。结果表明：随着GO用量的增大，GO/FFKM复合材料的邵尔A型硬度和高温压缩永久变形变化不大，拉伸强度和撕裂强度先增大后减小；当GO用量为1份时，GO/FFKM复合材料的拉伸强度和撕裂强度最大，耐介质性能较好。GO/FFKM复合材料适用于制备半导体加工用O形圈。 |
| 英文摘要: |
| The effects of the dosage of graphene oxide（GO）on the physical properties，compression set and dielectric resistance of GO/perfluoroether rubber（ FFKM）composites were studied. The results showed that with the increase the dosage of GO，the shore A hardness and high temperature compression set of the GO/FFKM composites changed little，and the tensile strength and tear strength increased at first and then decreased. When the dosage of GO was 1 phr， the tensile strength and tear strength of the GO/FFKM composites were the largest and the dielectric resistance was better. The GO/FFKM composites were suitable
for the O-rings for semiconductor processing. |
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