用作光致抗蚀剂的环化橡胶 |
Cyclized rubbers used as photoresists |
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DOI: |
中文关键词: 环化橡胶 阳离子环化 光刻胶 |
英文关键词: cyclized rubber cationic cyclization photoresist |
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中文摘要: |
介绍了环化聚异戊二烯和环化聚丁二烯橡胶的研究发展状况、合成方法、结构表征及在光刻胶中的应用,提出了环化橡胶的发展趋势。环化反应是按阳离子型机理进行的;分子结构由含不饱和双键的线形高分子链转变成含特殊多环结构的线形高子分链;由单体直接生产环化橡胶是研究的发展方向。 |
英文摘要: |
The development,synthesis and characterization of cyclized rubbers,as well as their application to photo resists are described.The cyclized rubbers are prepared by cationic cyclization,in which the linear molecule chains of rubbers with the unsaturated double bonds are transformed into those with the polycyclic structures.The polymerization of cyclized rubbers directly from monomer is to be developed in future. |
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